Project information
Study of plasmachemical processes using microwave and optical spectroscopy
- Project Identification
- GP202/01/P106
- Project Period
- 1/2001 - 1/2003
- Investor / Pogramme / Project type
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Czech Science Foundation
- Postdoctoral projects
- MU Faculty or unit
- Faculty of Science
Selected plasmachemical reactions in various types of discharges (low pressure radiofrequency discharge, low pressure DC discharge, low pressure microwave discharge, atmospheric pressure microwave torch, atmospheric pressure glow, etc.) will be studied b y means of electron paramagnetic resonance (EPR) spectroscopy and optical emission spectroscopy (OES). The project will concentrate on three main research topics: (i) influence of admixtures on heterogeneous reactions on the surface of a discharge tube, particularly the surface recombination of atoms. Concentration of selected atoms in the afterglow will be measured in dependence on amount of impurity, afterglow position, wall temperature, etc. The goal is to understand better this process, describe it both experimentally and theoretically and finally draw the conclusions about possible applications in industry (e.g. higher nitridation rate). (ii) Determination of rate constants of main reactions between organosilicon compounds (TEOS, HMDSO, HMDSZ, OMT
Publications
Total number of publications: 35
2001
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Optical diagnostics of inductively coupled RF discharge
SAPP 13th Symposium Proceedings, year: 2001
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Practical exercises in applied plasma chemistry
15th ISPC symposium proceedings, year: 2001
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Preparation of enhanced CN-based hard coatings by PECVD
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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Spectroscopic Investigation of Electron and Neutral Gas Temperatures in Microwave Torch Plasmas at Atmospheric Pressure
Proceedings of XXV ICPIG, year: 2001
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Study of hydrocarbons decomposition in microwave discharge and mass spectrometry of radiofrequency discharges in liquids
SAPP 13th Symposium Proceedings, year: 2001