Project information
Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
- Project Identification
- GAP205/12/0407
- Project Period
- 1/2012 - 12/2016
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
Tento projekt je zaměřen na studium chování hybridního PVD-PECVD procesu, který bude využit pro přípravu nanostrukturovaných kompozitních materiálů typu n-MC/a-C(:H). Hlavním cílem tohoto projektu je provést rozsáhlou diagnostiku depozičního plazmatu a porozumět souvislostem mezi parametry depozičního procesu, vlastnostmi depozičního plazmatu a vlastnostmi deponovaných vrstev.
Publications
Total number of publications: 60
2018
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Optimization and influence of pillar shape on micro-compression tests results
Year: 2018, type: Conference abstract
2017
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On the significance of running-in of hard nc-TiC/a-C:H coating for short-term repeating machining
Surface & coatings technology, year: 2017, volume: 315, edition: April, DOI
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Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
Journal of Physics D: Applied Physics, year: 2017, volume: 50, edition: 36, DOI
2016
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Development of deposition process for growth of titanium/carbon coatings at laborato ry and industrial scale
Year: 2016, type: Conference abstract
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Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
Surface & coatings technology, year: 2016, volume: 304, edition: October, DOI
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Structure Reinforcement and Phase Change in nc-TiC/a-C:H Coatings Induced by HiPIMS
Year: 2016, type: Conference abstract
2015
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Cathode voltage and discharge current oscillations and spoke behavior during HiPIMS discharge
Year: 2015, type: Appeared in Conference without Proceedings
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Comparative analysis of thermal stability of two different nc-TiC/a-C:H coatings
Surface & coatings technology, year: 2015, volume: 267, edition: april, DOI
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COMPARISON OF STRUCTURE AND MECHANICAL PROPERTIES OF nc-TiC/a-C(:H) AND nc-(Ti,Ni)C/a-C(:H) COATINGS
Year: 2015, type: Conference abstract
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Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge
Potential Application of Plasma and Nanomaterials 2015, year: 2015