Mgr. Kristína Tomanková

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Total number of publications: 1

2023

Simulation of a hollow-cathode PECVD process in O2/TMDSO for silicon dioxide deposition - Cross-code validation of 2D plasma model and global plasma model

TOMANKOVÁ Kristína KUBEČKA Martin RIVOLTA Nicolas CORNIL David OBRUSNÍK Adam

Article in Periodical

Surface and Coatings Technology, year: 2023, volume: 474, edition: December, DOI