Mgr. Peter Klein, Ph.D.

Výzkumný pracovník II, Deposition of Thin films and Nanostructures

correspondence Address:
Kotlářská 267/2, 611 37 Brno

e‑mail:

social and academic networks:

Basic information

Type

Total number of publications: 91

2012

Monitoring and control of RF driven PVD, PECVD and etching plasmas using Fourier components of discharge voltages

VAŠINA Petr DVOŘÁK Pavel ŽEMLIČKA Radek KLEIN Peter BURŠÍKOVÁ Vilma

Conference abstract

Year: 2012, type: Conference abstract