Mgr. Peter Klein, Ph.D.
Výzkumný pracovník II, Deposition of Thin films and Nanostructures
Total number of publications: 104
2026
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In-situ analysis of metal atom, metal ion and argon ion fluxes in industrial magnetron sputtering with Al, Cr and AlCr targets
SURFACE & COATINGS TECHNOLOGY, year: 2026, volume: 526, edition: April, DOI
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On the sputtered particle density and flux evolutions in multi-pulse HiPIMS processes
PLASMA SOURCES SCIENCE & TECHNOLOGY, year: 2026, volume: 35, edition: 2, DOI
2025
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Dielektrický povlak s vysokou dielektrickou pevností
Year: 2025
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Exploring different approaches of multipulse HiPIMS
Surface and Coatings Technology, year: 2025, volume: 496, edition: January, DOI
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Exploring ionised metal flux fraction in magnetron sputtering: Insights from laboratory and industrial applications
Surface and Coatings Technology, year: 2025, volume: 500, edition: March, DOI
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Impact of the pulse length in HiPIMS on the deposition rate, ion metal flux fraction and argon ion flux
Year: 2025, type: Conference abstract
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Ověřená technologie - prediktivní simulace AlCrN procesu
Year: 2025
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Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM
Surface and Coatings Technology, year: 2025, volume: 517, edition: December, DOI
2024
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Impact of different m-HiPIMS parameters on deposition rate and flux ionization
Year: 2024, type: Conference abstract
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Technologie pro měření rychlosti růstu vrstvy a ionizace rozprášeného kovu při depozici s velmi vysokým výkonem
Year: 2024