Publikace
Počet publikací: 2
2025
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Understanding the effect of pulsed power delivery modes on reactive sputter deposition process and coating properties through experimental and plasma simulation studies
Surface and Coatings Technology, rok: 2025, ročník: 502, vydání: April 2025, DOI
2023
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Simulation of a hollow-cathode PECVD process in O2/TMDSO for silicon dioxide deposition - Cross-code validation of 2D plasma model and global plasma model
Surface and Coatings Technology, rok: 2023, ročník: 474, vydání: December, DOI